Semiconductor Grade Clean Component Sulfuric Acid Anodizing Line for High-Purity Aluminum Substrates

This fully automatic clean-type sulfuric acid anodizing line is engineered exclusively for high-purity aluminum semiconductor components. It produces uniform 8-15 μm natural clear oxide film without metallic salt dyeing contamination. The line supports hot water sealing or medium-temperature nickel-free sealing to meet strict semiconductor cleanliness and outgassing requirements.

1. Degreasing (low-surfactant clean degreasing)
2. Multi-stage pure water rinsing
3. Mild desmut treatment
4. High-purity sulfuric acid anodizing
5. Continuous ultra-pure water cascade rinsing
6. Sealing: Hot water sealing / Medium-temperature nickel-free sealing
7. Final pure water rinsing
8. Controlled low-temperature drying

• Fully automatic running mode ensures consistent film thickness within 8-15 μm across batches
• Metallic salt dyeing is eliminated to prevent ionic pollution that affects semiconductor performance
• Supports nickel-free sealing solutions, complying with semiconductor industry environmental and outgassing standards
• Equipped with high-precision continuous filtration & ultra-pure water supply to maintain bath cleanliness
• Strictly controlled rinsing cascades minimize residual acid and foreign particle carryover

• Pre-treatment tank group
• High-purity sulfuric acid anodizing tank
• Multi-stage UPW rinsing system
• Sealing tank (hot water / nickel-free medium-temperature sealing)
• DC anodizing rectifier
• High-precision circulation filter system
• Clean low-temperature drying oven
• Waste gas & wastewater treatment unit
• PLC automatic gantry crane & central control system

Metal ions from colorants may remain inside the oxide film, causing ion migration, contamination and reliability risks for semiconductor assemblies. Natural clear anodizing is adopted.

Medium-temperature nickel-free sealing avoids nickel ion residue. It satisfies semiconductor requirements for low outgassing and heavy-metal-free surfaces.

The main configuration is fully automatic for mass production; a semi-automatic / manual clean module can be supplied as an optional upgrade for sampling orders.